The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 04, 2025
Filed:
Mar. 03, 2020
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Keunwook Shin, Yongin-si, KR;
Janghee Lee, Yongin-si, KR;
Seunggeol Nam, Suwon-si, KR;
Hyeonjin Shin, Suwon-si, KR;
Hyunseok Lim, Suwon-si, KR;
Alum Jung, Suwon-si, KR;
Kyung-Eun Byun, Seongnam-si, KR;
Jeonil Lee, Suwon-si, KR;
Yeonchoo Cho, Seongnam-si, KR;
Assignee:
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 16/26 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/02527 (2013.01); C23C 16/02 (2013.01); C23C 16/26 (2013.01); H01L 21/0257 (2013.01); H01L 21/02658 (2013.01);
Abstract
A method of pre-treating a substrate on which graphene will be directly formed may include pre-treating the substrate using a pre-treatment gas including at least a carbon source and hydrogen.