The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2024
Filed:
Feb. 06, 2024
Auros Technology, Inc., Hwaseong-si, KR;
Sol-Lee Hwang, Hwaseong-si, KR;
Dong-Won Jung, Hwaseong-si, KR;
Hee-Chul Lim, Hwaseong-si, KR;
Hyun-Kyoo Shon, Hwaseong-si, KR;
Min-Ho Lee, Hwaseong-si, KR;
AUROS TECHNOLOGY, INC., Hwaseong-si, KR;
Abstract
A non-transitory computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device that measures an error between a first overlay mark and a second overlay mark formed on different layers of a wafer. The data include information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.