The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2024
Filed:
Jul. 07, 2020
Asml Netherlands B.v., Veldhoven, NL;
Narjes Javaheri, Eindhoven, NL;
Maurits Van Der Schaar, Eindhoven, NL;
Tieh-Ming Chang, Eindhoven, NL;
Hilko Dirk Bos, Utrecht, NL;
Patrick Warnaar, Tilburg, NL;
Samira Bahrami, Amsterdam, NL;
Mohammadreza Hajiahmadi, Den Bosch, NL;
Sergey Tarabrin, Eindhoven, NL;
Mykhailo Semkiv, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed is a method comprising measuring radiation reflected from a metrology target and decomposing the measured radiation in components, for example Fourier components or spatial components. Further, there is disclosed a recipe selection method which provides an algorithm to select a parameter of the metrology apparatus based on re-calculated dependencies of 5 the measured radiation based on single components.