The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 13, 2024

Filed:

Dec. 12, 2022
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Chen-Hua Yu, Hsinchu, TW;

Yun Chen Hsieh, Baoshan Township, TW;

Hui-Jung Tsai, Hsinchu, TW;

Hung-Jui Kuo, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01L 21/285 (2006.01); H01L 21/288 (2006.01); H01L 21/3213 (2006.01); H01L 21/48 (2006.01); H01L 21/56 (2006.01); H01L 21/66 (2006.01); H01L 21/683 (2006.01); H01L 21/768 (2006.01); H01L 21/78 (2006.01); H01L 23/00 (2006.01); H01L 23/31 (2006.01); H01L 23/48 (2006.01); H01L 23/482 (2006.01);
U.S. Cl.
CPC ...
H01L 23/49827 (2013.01); H01L 21/288 (2013.01); H01L 21/32134 (2013.01); H01L 21/32136 (2013.01); H01L 21/486 (2013.01); H01L 21/561 (2013.01); H01L 21/568 (2013.01); H01L 21/6835 (2013.01); H01L 21/76802 (2013.01); H01L 21/7685 (2013.01); H01L 21/76885 (2013.01); H01L 21/78 (2013.01); H01L 22/14 (2013.01); H01L 23/3128 (2013.01); H01L 23/481 (2013.01); H01L 24/05 (2013.01); H01L 24/19 (2013.01); H01L 24/20 (2013.01); H01L 24/96 (2013.01); H01L 21/28568 (2013.01); H01L 23/49866 (2013.01); H01L 2221/68372 (2013.01); H01L 2221/68381 (2013.01); H01L 2224/95001 (2013.01); H01L 2924/35121 (2013.01);
Abstract

Embodiments include plating a contact feature in a first opening in a mask layer, the contact feature physically coupled to a contact pad, the contact feature partially filling the first opening. A solder cap is directly plated onto the contact feature in the first opening. The mask layer is then removed to expose an upper surface of a work piece, the contact feature vertically protruding from the work piece. After utilizing the solder cap, etching the solder cap to remove the solder cap from over the contact feature. A first encapsulant is deposited laterally around and over an upper surface of the contact feature. The first encapsulant is planarized to level an upper surface of the first encapsulant with the upper surface of the contact feature.


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