The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 06, 2024

Filed:

May. 31, 2023
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;

Inventors:

Yao-Sheng Huang, Kaohsiung, TW;

Hung-Chang Sun, Kaohsiung, TW;

I-Ming Chang, Hsinchu, TW;

Zi-Wei Fang, Hsinchu County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 21/02 (2006.01); H01L 21/311 (2006.01); H01L 29/08 (2006.01); H01L 29/78 (2006.01); H01L 21/306 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66795 (2013.01); H01L 21/02488 (2013.01); H01L 21/02513 (2013.01); H01L 21/02532 (2013.01); H01L 21/02592 (2013.01); H01L 21/02598 (2013.01); H01L 21/0262 (2013.01); H01L 21/02639 (2013.01); H01L 21/02661 (2013.01); H01L 21/02675 (2013.01); H01L 21/31116 (2013.01); H01L 29/0847 (2013.01); H01L 29/66545 (2013.01); H01L 29/785 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/30604 (2013.01);
Abstract

A semiconductor device includes a semiconductor fin, a gate structure, a doped semiconductor layer, and a dielectric structure. The semiconductor fin has a top portion and a lower portion extending from the top portion to a substrate. The gate structure extends across the semiconductor fin. The doped semiconductor layer interfaces the top portion of the semiconductor fin. In a cross-section taken along a lengthwise direction of the gate structure, the doped semiconductor layer has an outer profile conformal to a profile of the top portion of the semiconductor fin.


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