The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 11, 2024
Filed:
Jul. 28, 2023
Applicant:
Auros Technology, Inc., Hwaseong-si, KR;
Inventors:
Sol-Lee Hwang, Hwaseong-si, KR;
Hee-Chul Lim, Hwaseong-si, KR;
Dong-Won Jung, Hwaseong-si, KR;
Min-Ho Lee, Hwaseong-si, KR;
Hyun-Kyoo Shon, Hwaseong-si, KR;
Assignee:
AUROS TECHNOLOGY, INC., Hwaseong-si, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/681 (2013.01);
Abstract
An overlay measurement device includes a transmission and receipt part and a processor connecting to the transmission and receipt part electrically. The processor obtains data transmitted from a user terminal through the transmission and receipt part, analyzes a recipe included in the data, and performs optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed.