The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2024
Filed:
Mar. 22, 2021
Applied Materials Israel Ltd., Rehovot, IL;
David Uliel, Tel-Mond, IL;
Yan Avniel, Rehovot, IL;
Bobin Mathew Skaria, Kasturi Nagar, IN;
Oz Fox-Kahana, Rehovot, IL;
Gal Daniel Gutterman, Meitar, IL;
Atai Baldinger, Tel Aviv, IL;
Murad Muslimany, Nazareth, IL;
Erez Lidor, Yavne, IL;
Applied Materials Israel Ltd., Rehovot, IL;
Abstract
There is provided a system and method of examination of a semiconductor specimen, comprising: obtaining a sequence of frames of an area of the specimen acquired by an electron beam tool configured to scan the area from a plurality of directions, the sequence comprising a plurality of sets of frames each acquired from a respective direction; and registering the plurality of sets of frames and generating an image of the specimen based on result of the registration, comprising: performing, for each direction, a first registration among the set of frames acquired therefrom, and combining the registered set of frames to generate a first composite frame, giving rise to a plurality of first composite frames respectively corresponding to the plurality of directions; and performing a second registration among the plurality of first composite frames, and combining the registered plurality of first composite frames to generate the image of the specimen.