The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2024
Filed:
Mar. 29, 2023
Kla Corporation, Milpitas, CA (US);
Brian Duffy, San Jose, CA (US);
Bradley Ries, San Jose, CA (US);
Laurent Karsenti, Rehovot, IL;
Kuljit S. Virk, Fremont, CA (US);
Asaf J. Elron, Ramat Hasharon, IL;
Ruslan Berdichevsky, Zoran, IL;
Oriel Ben Shmuel, Netanya, IL;
Shlomi Fenster, Beit Shemesh, IL;
Yakir Gorski, Givatayim, IL;
Oren Dovrat, Tel Aviv-Jaffa, IL;
Ron Dekel, Givatayim, IL;
Emanuel Garbin, Tel Aviv-Jaffa, IL;
Sasha Smekhov, Kiryat Ono, IL;
KLA Corporation, Milpitas, CA (US);
Abstract
A context-based inspection system is disclosed. The system may include an optical imaging sub-system. The system may further include one or more controllers communicatively coupled to the optical imaging system. The one or more controllers may be configured to: receive one or more reference images; receive one or more test images of a sample; generate one or more probabilistic context maps during inspection runtime using an unsupervised classifier; provide the generated one or more probabilistic context maps to a supervised classifier during the inspection runtime; and apply the supervised classifier to the received one or more test images to identify one or more DOIs on the sample.