The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 14, 2023

Filed:

Mar. 05, 2020
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Jeremy Ecton, Gilbert, AZ (US);

Brandon C. Marin, Chandler, AZ (US);

Leonel Arana, Phoenix, AZ (US);

Matthew Tingey, Mesa, AZ (US);

Oscar Ojeda, Chandler, AZ (US);

Hsin-Wei Wang, Chandler, AZ (US);

Suddhasattwa Nad, Chandler, AZ (US);

Srinivas Pietambaram, Chandler, AZ (US);

Gang Duan, Chandler, AZ (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/528 (2006.01); H01L 23/532 (2006.01); H01L 21/3213 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76885 (2013.01); H01L 21/7685 (2013.01); H01L 21/76834 (2013.01); H01L 21/76852 (2013.01); H01L 23/528 (2013.01); H01L 23/53238 (2013.01); H01L 21/32134 (2013.01);
Abstract

A conductive route for an integrated circuit assembly may be formed using a sequence of etching and passivation steps through layers of conductive material, wherein the resulting structure may include a first route portion having a first surface, a second surface, and at least one side surface extending between the first surface and the second surface, an etch stop structure on the first route portion, a second route portion on the etch stop layer, wherein the second route portion has a first surface, a second surface, and at least one side surface extending between the first surface and the second surface, and a passivating layer abutting the at least one side surface of the second route portion.


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