The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 08, 2023
Filed:
Jun. 16, 2021
Bruker Nano, Inc., Santa Barbara, CA (US);
Jeffrey Wong, Simi Valley, CA (US);
Joseph Fragala, Camarillo, CA (US);
Weijie Wang, Thousand Oaks, CA (US);
Deepkishore Mukhopadhyay, Ventura, CA (US);
Xing Zhao, Camarillo, CA (US);
Rakesh Poddar, Camarillo, CA (US);
Bruker Nano, Inc., Santa Barbara, CA (US);
Abstract
A method of batch-fabricating an array of probe devices for a surface analysis instrument, such as an atomic force microscope (AFM), includes providing a wafer, and photolithographically forming a base and a cantilever for each probe. The cantilever includes a built-in angle, θ, relative to the base, and the base is substantially parallel to a sample holder when the probe device is mounted in a probe holder of the surface analysis instrument.