The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 14, 2022
Filed:
Feb. 10, 2020
Carl Zeiss Smt Gmbh, Oberkochen, DE;
Ben Wylie-Van Eerd, Hataitai Wellington, NZ;
Frederik Bijkerk, Bosch en Duin, NL;
Kerstin Hild, Schwaebisch Gmuend, DE;
Toralf Gruner, Aalen, DE;
Stefan Schulte, Lauchheim, DE;
Simone Weyler, Heidenheim, DE;
CARL ZEISS SMT GMBH, Oberkochen, DE;
Abstract
A mirror having a mirror substrate (), a reflection layer stack () reflecting electromagnetic radiation having an operating wavelength that is incident on the optical effective surface (), and at least one piezoelectric layer (), arranged between the substrate and the reflection layer stack and to which an electric field producing a locally variable deformation is applied. A first electrode arrangement () situated on the side of the piezoelectric layer faces the reflection layer stack, and a second electrode arrangement () is situated on the side of the piezoelectric layer facing the mirror substrate. Optionally, a bracing layer () is provided, which limits sinking of the piezoelectric layer () into the mirror substrate () when an electric field is applied, in comparison with an analogous construction lacking the bracing layer, thereby increasing the piezoelectric layer's effective deflection.