The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 31, 2022
Filed:
Mar. 10, 2021
Asml Netherlands B.v., Veldhoven, NL;
Wim Tjibbo Tel, Helmond, NL;
Bart Peter Bert Segers, Tessenderlo, BE;
Everhardus Cornelis Mos, Best, NL;
Emil Peter Schmitt-Weaver, Eindhoven, NL;
Yichen Zhang, Eindhoven, NL;
Petrus Gerardus Van Rhee, Nijmegen, NL;
Xing Lan Liu, Ukkel, BE;
Maria Kilitziraki, Veldhoven, NL;
Reiner Maria Jungblut, Eindhoven, NL;
Hyunwoo Yu, Hwaseong-si, KR;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A method, involving determining a first distribution of a first parameter associated with an error or residual in performing a device manufacturing process; determining a second distribution of a second parameter associated with an error or residual in performing the device manufacturing process; and determining a distribution of a parameter of interest associated with the device manufacturing process using a function operating on the first and second distributions. The function may include a correlation.