The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 09, 2021
Filed:
Feb. 28, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Priyadarshi Panda, Newark, CA (US);
Seshadri Ganguli, Sunnyvale, CA (US);
Sang Ho Yu, Cupertino, CA (US);
Sung-Kwan Kang, San Jose, CA (US);
Gill Yong Lee, San Jose, CA (US);
Sanjay Natarajan, Portland, OR (US);
Rajib Lochan Swain, Sunnyvale, CA (US);
Jorge Pablo Fernandez, Saratoga, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods of forming memory devices are described. Some embodiments of the disclosure utilize a low temperature anneal process to reduce bottom voids and seams in low melting point, low resistance metal buried word lines. Some embodiments of the disclosure utilize a high density dielectric cap during a high temperature anneal process to reduce bottom voids in buried word lines.