The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2020

Filed:

Dec. 17, 2019
Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventors:

Shang-Yun Hou, Jubei, TW;

Sao-Ling Chiu, Hsinchu, TW;

Ping-Kang Huang, Chiayi, TW;

Wen-Hsin Wei, Hsinchu, TW;

Wen-Chih Chiou, Zhunan Township, TW;

Shin-Puu Jeng, Hsinchu, TW;

Bruce C. S. Chou, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/498 (2006.01); H01L 23/00 (2006.01); H01L 25/00 (2006.01); H01L 21/44 (2006.01); H01L 23/522 (2006.01); H01L 21/304 (2006.01); H01L 21/306 (2006.01); H01L 21/56 (2006.01); H01L 23/31 (2006.01);
U.S. Cl.
CPC ...
H01L 24/17 (2013.01); H01L 21/304 (2013.01); H01L 21/30604 (2013.01); H01L 21/44 (2013.01); H01L 21/565 (2013.01); H01L 23/3107 (2013.01); H01L 23/49811 (2013.01); H01L 23/522 (2013.01); H01L 23/5226 (2013.01); H01L 24/03 (2013.01); H01L 24/09 (2013.01); H01L 24/11 (2013.01); H01L 24/81 (2013.01); H01L 25/50 (2013.01); H01L 2224/0382 (2013.01); H01L 2224/0401 (2013.01); H01L 2224/05026 (2013.01); H01L 2224/05111 (2013.01); H01L 2224/05124 (2013.01); H01L 2224/05139 (2013.01); H01L 2224/05144 (2013.01); H01L 2224/05147 (2013.01); H01L 2224/05155 (2013.01); H01L 2224/1182 (2013.01); H01L 2224/13 (2013.01); H01L 2224/16113 (2013.01); H01L 2224/16227 (2013.01); H01L 2224/73204 (2013.01); H01L 2224/81815 (2013.01); H01L 2224/97 (2013.01); H01L 2924/0002 (2013.01); H01L 2924/181 (2013.01);
Abstract

Embodiments of the present disclosure include a semiconductor device and methods of forming a semiconductor device. An embodiment is a method of forming a semiconductor device, the method comprising forming a conductive pad in a first substrate, forming an interconnecting structure over the conductive pad and the first substrate, the interconnecting structure comprising a plurality of metal layers disposed in a plurality of dielectric layers, bonding a die to a first side of the interconnecting structure, and etching the first substrate from a second side of the interconnecting structure, the etching exposing a portion of the conductive pad.


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