The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 20, 2020

Filed:

Dec. 30, 2016
Applicant:

Intel Corporation, Santa Clara, CA (US);

Inventors:

Rahul Ramaswamy, Hillsboro, OR (US);

Chia-Hong Jan, Portland, OR (US);

Walid Hafez, Portland, OR (US);

Neville Dias, Hillsboro, OR (US);

Hsu-Yu Chang, Hillsboro, OR (US);

Roman Olac-Vaw, Hillsboro, OR (US);

Chen-Guan Lee, Hillsboro, OR (US);

Assignee:

Intel Corporation, Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01P 3/12 (2006.01); H01L 21/768 (2006.01); H01L 21/8234 (2006.01); H01L 23/66 (2006.01); H01P 3/127 (2006.01); H01P 5/12 (2006.01); H01P 11/00 (2006.01);
U.S. Cl.
CPC ...
H01P 3/121 (2013.01); H01L 21/76877 (2013.01); H01L 21/823475 (2013.01); H01L 23/66 (2013.01); H01P 3/122 (2013.01); H01P 3/127 (2013.01); H01P 5/12 (2013.01); H01P 11/002 (2013.01); H01L 2223/6627 (2013.01);
Abstract

Embodiments of the invention include an electromagnetic waveguide and methods of forming the electromagnetic waveguide. In an embodiment the electromagnetic waveguide includes a first spacer and a second spacer. In an embodiment, the first and second spacer each have a reentrant profile. The electromagnetic waveguide may also include a conductive body formed between in the first and second spacer, and a void formed within the conductive body. In an additional embodiment, the electromagnetic waveguide may include a first spacer and a second spacer. Additionally, the electromagnetic waveguide may include a first portion of a conductive body formed along sidewalls of the first and second spacer and a second portion of the conductive body formed between an upper portion of the first portion of the conductive body. In an embodiment, the first portion of the conductive body and the second portion of the conductive body define a void through the electromagnetic waveguide.


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