The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 21, 2020
Filed:
Mar. 13, 2019
Asml Netherlands B.v., Veldhoven, NL;
Sudhir Srivastava, Eindhoven, NL;
Sander Bas Roobol, Veldhoven, NL;
Simon Gijsbert Josephus Mathijssen, Rosmalen, NL;
Nan Lin, Eindhoven, NL;
Sjoerd Nicolaas Lambertus Donders, Vught, NL;
Krijn Frederik Bustraan, Eindhoven, NL;
Petrus Wilhelmus Smorenburg, Veldhoven, NL;
Gerrit Jacobus Hendrik Brussaard, Boxtel, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Disclosed is a high harmonic generation (HHG) radiation source which may be used to generate measurement radiation for an inspection apparatus. In such a radiation source, a pump radiation source is operable to emit pump radiation at a high harmonic generation gas medium thereby exciting the high harmonic generation gas medium within a pump radiation interaction region so as to generate the high harmonic radiation and an ionization radiation source is operable to emit ionization radiation at the high harmonic generation gas medium to ionize a gas at an ionization region between the pump radiation interaction region and an optical output of the illumination source.