The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2019

Filed:

Apr. 05, 2018
Applicant:

Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu, TW;

Inventors:

Chun-Lin Louis Chang, Hsinchu County, TW;

Jen-Hao Yeh, Hsinchu, TW;

Han-Lung Chang, Hsinchu, TW;

Tzung-Chi Fu, Miaoli County, TW;

Bo-Tsun Liu, Taipei, TW;

Li-Jui Chen, Hsinchu, TW;

Po-Chung Cheng, Chiayi County, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05G 2/00 (2006.01); H01S 3/104 (2006.01); H01S 3/11 (2006.01); G21K 1/06 (2006.01); H01S 3/23 (2006.01); H01S 3/223 (2006.01);
U.S. Cl.
CPC ...
H05G 2/008 (2013.01); G21K 1/062 (2013.01); H05G 2/005 (2013.01); H01S 3/11 (2013.01); H01S 3/2232 (2013.01); H01S 3/2316 (2013.01);
Abstract

A laser system includes a laser source operable to provide a laser beam; a laser amplifier having an input port and an output port and operable to amplify the laser beam, the laser beam travelling along a main beam path through the laser amplifier from the input port to the output port; and a residual gain monitor operable to provide a probe laser beam, the probe laser beam travelling along a probe beam path through the laser amplifier from the output port to the input port, wherein the residual gain monitor calculates a residual gain of the laser amplifier according to the probe laser beam.


Find Patent Forward Citations

Quick Actions:

Chang, Chun-Lin. (2019). Residual gain monitoring and reduction for euv drive laser (U.S. Patent No. 10524345). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10524345

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