The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2019
Filed:
Dec. 21, 2015
Versum Materials Us, Llc, Tempe, AZ (US);
Wen Dar Liu, Chupei, TW;
Yi-Chia Lee, Chupei, TW;
Tianniu Chen, Westford, MA (US);
William Jack Casteel, Jr., Fountain Hill, PA (US);
Seiji Inaoka, Macungie, PA (US);
Gene Everad Parris, Coopersburg, PA (US);
VERSUM MATERIALS US, LLC, Tempe, AZ (US);
Abstract
A composition for cleaning integrated circuit substrates, the composition comprising: water; an oxidizer comprising an ammonium salt of an oxidizing species; a corrosion inhibitor comprising a primary alkylamine having the general formula: R'NH, wherein R′ is an alkyl group containing up to about 150 carbon atoms and will more often be an aliphatic alkyl group containing from about 4 to about 30 carbon atoms; optionally, a water-miscible organic solvent; optionally, an organic acid; optionally, a buffer species; optionally, a fluoride ion source; and optionally, a metal chelating agent.