The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Apr. 29, 2016
Applied Materials, Inc., Santa Clara, CA (US);
Kaushik Alayavalli, Santa Clara, CA (US);
Xinhai Han, Santa Clara, CA (US);
Praket P. Jha, San Jose, CA (US);
Masaki Ogata, San Jose, CA (US);
Zhijun Jiang, Sunnyvale, CA (US);
Allen Ko, Fremont, CA (US);
Ndanka O. Mukuti, Santa Clara, CA (US);
Thuy Britcher, San Jose, CA (US);
Amit Kumar Bansal, Sunnyvale, CA (US);
Ganesh Balasubramanian, Sunnyvale, CA (US);
Juan Carlos Rocha-Alvarez, San Carlos, CA (US);
Bok Hoen Kim, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
A method and apparatus for a dual-channel showerhead is provided. In one embodiment the showerhead comprises a body comprising a conductive material having a plurality of first openings formed therethrough comprising a first gas channel and a plurality of second openings formed therethrough comprising a second gas channel that is fluidly separated from the first gas channel, wherein each of the first openings having a geometry that is different than each of the second openings.