Allen Ko

Title: The Innovations of Allen Ko: Pioneering Advances in 3D NAND Technology

Introduction

Allen Ko, an accomplished inventor based in Fremont, CA, has made significant contributions to the field of semiconductor technology. With three patents to his name, he has provided essential innovations that enhance both the performance and efficiency of memory devices.

Latest Patents

Allen's latest patents focus on cutting-edge techniques aimed at improving 3D NAND memory devices. The first patent details a method for plasma enhanced chemical vapor deposition (PECVD) of films that enhance vertical etch performance in these devices. This innovation addresses the challenges of tapering vertical etch profiles, especially as the gate heights increase. By employing a unique deposition scheme and grading various film properties, Allen has enabled the creation of a more uniform etch profile, compensating for inconsistent etching rates.

The second patent highlights the development of a dual-channel showerhead designed for the formation of film stacks. This innovative apparatus includes channels with geometries that differ from one another, allowing for improved precision in gas delivery during the film deposition process.

Career Highlights

Allen Ko currently works at Applied Materials, Inc., a leader in providing equipment, services, and software for the semiconductor industry. His work has not only contributed to the advancement of 3D NAND technology but has positioned him as a key figure in the research and development landscape of semiconductor manufacturing.

Collaborations

Throughout his career, Allen has collaborated with notable colleagues, including Praket Prakash Jha and Xinhai Han. Their collective expertise and innovative spirit have fostered an environment that promotes groundbreaking advancements in semiconductor technology.

Conclusion

Allen Ko's inventive spirit and technical acumen continue to shape the future of memory device manufacturing. His latest patents demonstrate a commitment to solving complex engineering challenges, ensuring that the semiconductor industry can meet the increasing demands for performance and efficiency in today's technology-driven world. Allen Ko stands out as a true innovator, dedicated to pushing the boundaries of what's possible in semiconductor science.