The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2019
Filed:
Jan. 22, 2016
Rohm and Haas Electronic Materials Cmp Holdings, Inc., Newark, DE (US);
Dow Global Technologies Llc, Midland, MI (US);
Scott Chang, Taipei, TW;
Jeff Tsai, Chunan, TW;
Francis V. Acholla, New Castle, DE (US);
Andrew Wank, Avondale, PA (US);
Mark Gazze, Lincoln University, PA (US);
William A. Heeschen, Midland, MI (US);
James David Tate, Lake Jackson, TX (US);
Leo H. Chiang, Pearland, TX (US);
Swee-Teng Chin, Pearland, TX (US);
Rohm and Haas Electronic Matericals CMP Holdings, Inc., Newark, DE (US);
Dow Global Technologies LLC, Midland, MI (US);
Abstract
A polishing layer analyzer is provided, wherein the analyzer is configured to detect macro inhomogeneities is polymeric sheets and to classify the polymeric sheets as either acceptable or suspect.