The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2018
Filed:
Mar. 14, 2013
Applicant:
Nexplanar Corporation, Hillsboro, OR (US);
Inventors:
Paul Andre Lefevre, Portland, OR (US);
William C. Allison, Beaverton, OR (US);
Alexander William Simpson, Hillsboro, OR (US);
Diane Scott, Portland, OR (US);
Ping Huang, Beaverton, OR (US);
Leslie M. Charns, Portland, OR (US);
James Richard Rinehart, Portland, OR (US);
Robert Kerprich, Portland, OR (US);
Assignee:
Cabot Microelectronics Corporation, Aurora, IL (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 37/24 (2012.01); B24B 37/26 (2012.01);
U.S. Cl.
CPC ...
B24B 37/26 (2013.01);
Abstract
Polishing pads having a polishing surface with continuous protrusions having tapered sidewalls are described. Methods of fabricating polishing pads having a polishing surface with continuous protrusions having tapered sidewalls are also described.