The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2018
Filed:
Nov. 03, 2015
Applied Materials, Inc., Santa Clara, CA (US);
Hua Ai, Tracy, CA (US);
Jiang Lu, Milpitas, CA (US);
Avgerinos V. Gelatos, Scotts Valley, CA (US);
Paul F. Ma, Santa Clara, CA (US);
Sang Ho Yu, Cupertino, CA (US);
Feng Q. Liu, San Jose, CA (US);
Xinyu Fu, Pleasanton, CA (US);
Weifeng Ye, San Jose, CA (US);
APPLIED MATERIALS, INC., Santa Clara, CA (US);
Abstract
Methods for selectively depositing a cobalt layer are provided herein. In some embodiments, methods for selectively depositing a cobalt layer include: exposing a substrate to a first process gas to passivate an exposed dielectric surface, wherein the substrate comprises a dielectric layer having an exposed dielectric surface and a metal layer having an exposed metal surface; and selectively depositing a cobalt layer atop the exposed metal surface using a thermal deposition process.