Zung-Sun Choi

Title: Innovations of Zung-Sun Choi in Semiconductor Technology

Introduction

Zung-Sun Choi is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on the development of advanced semiconductor devices and manufacturing methods.

Latest Patents

One of Zung-Sun Choi's latest patents involves semiconductor devices and methods of manufacturing the same. This patent describes a semiconductor device that includes an insulation layer on a substrate with a plurality of lower conductive structures. The insulation layer features an opening, and a barrier layer is positioned on the sidewall and bottom of this opening. The barrier layer consists of a first barrier layer that is richer in a first deoxidizing material than a metal material, and a second barrier layer that is richer in a metal material than a second deoxidizing material. Additionally, an interconnection is placed in the opening, ensuring electrical connection to the lower conductive structure.

Another patent details a method of manufacturing a semiconductor device. In this method, a substrate is loaded into a process chamber with unit process sections where individual processes are performed. These processes occur independently at respective process pressures, allowing the substrate to undergo sequential unit processes. Cleaning processes are conducted for each unit process section when the substrate is transferred, which helps prevent process defects and extends the operational period of the manufacturing apparatus.

Career Highlights

Zung-Sun Choi is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has positioned him as a key player in the advancement of semiconductor technologies.

Collaborations

Zung-Sun Choi has collaborated with notable coworkers, including Jin-ho Park and Gil-heyun Choi. Their combined expertise contributes to the innovative projects at Samsung Electronics.

Conclusion

Zung-Sun Choi's contributions to semiconductor technology through his patents and work at Samsung Electronics highlight his role as an influential inventor in the field. His innovative approaches continue to shape the future of semiconductor manufacturing.