Zouming Zhu

Title: Innovations of Zouming Zhu in CVD Systems

Introduction

Zouming Zhu is a notable inventor based in Santa Clara, CA (US). He has made significant contributions to the field of chemical vapor deposition (CVD) systems. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of gas delivery methods in processing chambers.

Latest Patents

Zouming Zhu's latest patents include "Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems." This patent describes a method and apparatus for delivering precursor materials to a processing chamber. In one embodiment, the deposition apparatus features a chamber with a longitudinal axis and a gas distribution assembly attached to the chamber's sidewall. The assembly consists of multiple plenums connected to gas sources and an energy source that provides energy to each plenum. This innovative design allows for a flow path through the chamber that is normal to its longitudinal axis.

Another patent under his name is also titled "Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems." This patent elaborates on a gas distribution assembly with multiple gas delivery zones. Each zone includes a plenum that receives precursor gas and incorporates a source of non-thermal energy, such as an infrared light source. The intensity of the wavelengths from the infrared light source can be varied to optimize the delivery of precursor materials.

Career Highlights

Zouming Zhu is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has positioned him as a key player in advancing CVD technology.

Collaborations

Zouming has collaborated with several professionals in his field, including Howard Beckford and Brian Hayes Burrows. These collaborations have contributed to the development of innovative solutions in gas delivery systems.

Conclusion

Zouming Zhu's contributions to the field of CVD systems through his patents and work at Applied Materials, Inc. highlight his role as an influential inventor. His innovative approaches to gas delivery methods continue to impact the industry positively.