This inventor holds 1 USPTO granted patent. Top assignee: Kla Tencor Corporation. Active years: 2010.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2010
Title: ZiangHua Liu: Innovator in Substrate Conditioning Technology
Introduction
ZiangHua Liu is a renowned inventor based in Shanghai, China, recognized for his significant contributions to substrate conditioning technology. He holds a notable patent that addresses challenges in charge control on substrates, showcasing his innovative approach to improving measurement systems.
Latest Patents
Liu's patent, titled "Substrate Conditioning for Corona Charge Control," presents a sophisticated measurement system designed to take accurate readings in a designated test zone on a substrate surface. This invention features a chamber that creates a controlled environment, a surface treatment station that dispenses a stabilizing chemical, a charge deposition station that deposits a charge, and a QV measurement station that captures QV-based measurements. The interaction of these components within the chamber enhances the reliability of the QV measurements by effectively controlling charge spreading through the stabilizing chemical. Additionally, it contributes to improved measurement stability by mitigating the time trending effects on reactive dielectric substrates such as silicon oxynitride and high-k surfaces.
Career Highlights
Currently, ZiangHua Liu is affiliated with Kla Tencor Corporation, a company known for its technological advancements in the semiconductor industry. His expertise in substrate conditioning has made a significant impact on the company's innovations and product development.
Collaborations
Throughout his career, Liu has collaborated with other talented professionals, including coworkers Nanchang Zhu and Jainou Shi. These collaborations highlight the importance of teamwork in driving innovation and advancing technology in the field of substrate conditioning.
Conclusion
ZiangHua Liu's contributions to substrate conditioning represent a pivotal development in the field of measurement systems. His patent not only enhances the reliability of QV measurements but also improves the performance of reactive dielectrics. With a commitment to innovation and collaboration, Liu continues to influence the industry and inspire future advancements.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile