Zhuozhi Chen

Title: Innovations of Zhuozhi Chen in Wafer Alignment Technology

Introduction

Zhuozhi Chen is a notable inventor based in Mountain View, CA (US). He has made significant contributions to the field of wafer alignment technology, particularly through his innovative patent. His work is instrumental in enhancing the precision of semiconductor manufacturing processes.

Latest Patents

Zhuozhi Chen holds a patent for a "Vision-based wafer notch position measurement." This invention involves a wafer alignment system that utilizes an image capture device to capture images of a wafer positioned on a pedestal. The system includes an image analysis module that detects the edge of the wafer and a notch formed in the edge. It calculates the first and second edge positions based on the notch's position. Additionally, an offset calculation module determines the angular offset of the wafer, which is crucial for accurate processing. The system control module then manages the transfer of the wafer from the pedestal to a process cell based on this angular offset. This innovative approach significantly improves the efficiency and accuracy of wafer alignment.

Career Highlights

Zhuozhi Chen is currently employed at Lam Research Corporation, a leading company in the semiconductor equipment industry. His work at Lam Research has allowed him to apply his expertise in wafer alignment systems, contributing to advancements in semiconductor manufacturing.

Collaborations

Zhuozhi has collaborated with notable colleagues, including Gustavo G Francken and Brandon L Senn. These collaborations have fostered a productive environment for innovation and development within the company.

Conclusion

Zhuozhi Chen's contributions to wafer alignment technology through his patent demonstrate his commitment to advancing the semiconductor industry. His work at Lam Research Corporation and collaborations with esteemed colleagues further highlight his impact in this field.