Company Filing History:
Years Active: 2025
Title: The Innovative Mind of ZhuangYan Zhang: A Pioneer in Metrology Technology
Introduction: ZhuangYan Zhang is a distinguished inventor based in Berlin, Germany, known for his contributions to the field of metrology. With a focus on high harmonic generation, Zhang's innovations provide significant advancements in measurement techniques crucial for lithographic processes. His solitary patent reflects his expertise and dedication to enhancing the accuracy of metrology apparatus.
Latest Patents: ZhuangYan Zhang holds a patent for a "Metrology apparatus based on high harmonic generation and associated method." This invention discloses a metrology apparatus designed for measuring a target formed on a substrate through lithographic processes. The apparatus features a radiation source that delivers first radiation, a solid high harmonic generation medium that generates high harmonic second radiation, and a detection arrangement to identify the second radiation scattered by the target. This innovative device not only shapes the beam of the second radiation but also separates the first and second radiation, showcasing Zhang's technical ingenuity.
Career Highlights: ZhuangYan Zhang is currently employed at ASML Netherlands B.V., a leading company in the field of lithography equipment. His work at ASML positions him at the forefront of technological advancements in the semiconductor industry, where precise measurement tools are essential for the development of next-generation microchips.
Collaborations: Throughout his career, Zhang has collaborated with notable colleagues such as Peter Michael Kraus and Sylvianne Dorothea Christina Roscam Abbing. These collaborations have enabled the exchange of ideas and fostered an environment conducive to innovation in metrology and lithographic technology.
Conclusion: ZhuangYan Zhang's contributions to the field of metrology, particularly through his patented innovations, highlight his role as a leading inventor in technology. His work at ASML Netherlands B.V. and collaborations with esteemed colleagues reflect his commitment to advancing measurement techniques essential for the semiconductor industry. Zhang's innovative spirit continues to inspire future advancements in this critical domain of technology.