Zhiru Yu

Title: Zhiru Yu: Innovator in Semiconductor Manufacturing

Introduction

Zhiru Yu is a prominent inventor based in San Jose, CA, specializing in innovations within the semiconductor manufacturing industry. He holds 2 patents that reflect his expertise and contributions to the field. His work focuses on machine learning applications and optical proximity correction processes, which are crucial for enhancing semiconductor device manufacturing.

Latest Patents

Zhiru Yu's latest patents include a machine learning-based model builder and its applications for pattern transferring in semiconductor manufacturing. This patent discloses a system and method for optimizing an optical proximity correction (OPC) model for a photo mask. The machine learning-based model builder incorporates an OPC model, measurement data, and a random term generator. The random term generator produces random terms in an M-dimensional space, which are then classified into clusters using a classifying rule. A representative subset of these random terms is identified and integrated into the OPC model.

Another significant patent involves methods of preparing photo mask data and manufacturing a photo mask. This method outlines the process of creating a lithographic mask for integrated circuits, which includes performing an optical proximity correction on the layout pattern. The process enhances the corrected layout pattern to produce an OPC-ILT-enhanced layout pattern. A first contour image associated with this enhanced layout pattern is generated when projected onto a wafer, and the features of this image are extracted to create a second contour image of the developed photo resist pattern.

Career Highlights

Zhiru Yu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he applies his innovative ideas to advance semiconductor technology. His work has significantly impacted the efficiency and accuracy of semiconductor manufacturing processes.

Collaborations

Throughout his career, Zhiru Yu has collaborated with notable colleagues, including Lin Ping Zhang and Danping Peng. These collaborations have fostered a productive environment for innovation and development in the semiconductor field.

Conclusion

Zhiru Yu's contributions to semiconductor manufacturing through his patents and collaborative efforts highlight his role as a key innovator in the industry. His work continues to influence advancements in technology and manufacturing processes.