Zheng-Jie Xu

Title: Innovations of Zheng-Jie Xu in Semiconductor Manufacturing

Introduction

Zheng-Jie Xu is a notable inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His work focuses on enhancing the efficiency and safety of fabrication systems used in integrated circuit (IC) production.

Latest Patents

Zheng-Jie Xu's latest patents include an arcing protection method and a processing tool designed for semiconductor manufacturing. The first patent describes a fabrication system that incorporates a processing tool with at least one electrode and a radio frequency (RF) sensor. This system is capable of receiving RF signals during semiconductor manufacturing processes. The RF sensor wirelessly detects the intensity of the RF signal, allowing a computation device to extract statistical characteristics based on this detection. A fault detection and classification (FDC) system is integrated to determine if the detected intensity exceeds a predetermined threshold. If it does, the system notifies the processing tool to adjust the RF signal or halt operations to check for potential damage.

The second patent also focuses on a fabrication system for ICs, featuring a similar setup with an electrode and RF sensor. This system executes semiconductor manufacturing processes while monitoring the RF signal intensity. The FDC system plays a crucial role in ensuring that the intensity of the RF signal remains within safe limits, thereby preventing damage to the equipment and ensuring the integrity of the manufacturing process.

Career Highlights

Zheng-Jie Xu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to innovate in the semiconductor field. His expertise in RF signal detection and fault classification has positioned him as a valuable asset in the industry.

Collaborations

Throughout his career, Zheng-Jie Xu has collaborated with notable colleagues, including Wun-Kai Tsai and Wen-Che Liang. These collaborations have further enhanced the development of advanced semiconductor technologies.

Conclusion

Zheng-Jie Xu's contributions to semiconductor manufacturing through his innovative patents demonstrate his commitment to improving industry standards. His work not only enhances the efficiency of fabrication systems but also ensures the safety and reliability of semiconductor production processes.