The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2023
Filed:
Feb. 22, 2018
Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu, TW;
Wun-Kai Tsai, Huwei Township, Yunlin County, TW;
Wen-Che Liang, Taichung, TW;
Chao-Keng Li, Jhubei, TW;
Zheng-Jie Xu, Taichung, TW;
Chih-Kuo Chang, Baoshan Township, Hsinchu County, TW;
Sing-Tsung Li, Taichung, TW;
Feng-Kuang Wu, Hsinchu County, TW;
Hsu-Shui Liu, Pingjhen, TW;
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., Hsinchu, TW;
Abstract
A fabrication system for fabricating an IC is provided which includes a processing tool, a computation device and a FDC system. The processing tool includes an electrode and an RF sensor to execute a semiconductor manufacturing process to fabricate the IC. The RF sensor wirelessly detects the intensity of the RF signal. The computation device extracts statistical characteristics based on the detection of the intensity of the RF signal. The FDC system determines whether or not the intensity of the RF signal meets a threshold value or a threshold range according to the extracted statistical characteristics. When the detected intensity of the RF signal exceeds the threshold value or the threshold range, the FDC system notifies the processing tool to adjust the RF signal or stop tool to check parts damage.