Zhaohui Xi

Title: Zhaohui Xi: Innovator in Plasma Processing Technology

Introduction

Zhaohui Xi is a prominent inventor based in Shanghai, China. He has made significant contributions to the field of plasma processing technology, holding 2 patents that showcase his innovative approach to enhancing plasma processing devices.

Latest Patents

Zhaohui Xi's latest patents include a plasma processing method and a plasma processing device. The plasma processing method provides a unique approach for a plasma processing device, which consists of a reaction chamber and multiple Radio Frequency (RF) power supplies with different RF frequency outputs. These power supplies apply RF electric fields to the reaction chamber, allowing for a versatile processing method that includes a match frequency obtaining step and a pulse processing step. In the match frequency obtaining step, the output state of the pulse RF power supply is switched to create multiple impedances in the reaction chamber, simulating the impedances required in the pulse processing step. The output frequencies of the variable frequency RF power supply are then adjusted to match these simulated impedances, with the adjusted output frequencies stored as match frequencies. In the subsequent pulse processing step, the fast switched impedances are instantly matched by the stored match frequencies.

Another notable patent is the method and system for autotuning of RF match. This invention allows for a reactive correction to chamber impedance changes without the need to alter the process recipe. The reactive correction can be performed automatically and repeatedly during processing, optimizing the control of RF power application to a plasma processing chamber. This minimizes reflected power and ensures efficient application of RF power to the plasma, enabling autotuning without modifying a qualified process recipe.

Career Highlights

Zhaohui Xi has worked with notable companies in the field, including Advanced Micro-Fabrication Equipment Inc. and Advanced Micro-Fabrication Equipment, Inc. Asia. His experience in these organizations has contributed to his expertise in plasma processing technologies.

Collaborations

Throughout his career, Zhaohui has collaborated with esteemed colleagues such as Lei Xu and Tuqiang Q Ni. These collaborations have further enriched his work and innovations in the field.

Conclusion

Zhaohui Xi is a distinguished inventor whose work in plasma processing technology has led to significant advancements in the industry. His innovative patents and collaborations reflect his commitment to enhancing the efficiency and effectiveness of plasma processing devices.