Yuzhi Li

Title: Yuzhi Li: Pioneer in Optical Measurement Technology

Introduction

Yuzhi Li, an innovative inventor based in Shanghai, China, has made significant contributions to the field of optical measurement technology. With a strong focus on improving measurement precision, he has been awarded two patents that showcase his expertise and commitment to advancing the industry.

Latest Patents

Yuzhi's latest patents include groundbreaking inventions:

1. **Optical Measurement Device and Method** - This invention describes an optical measurement device comprised of a deformation measurement device that measures the magnitude of deformation of an optical detection platform frame. Additionally, it features a correction module designed to adjust the position of a substrate carrier and/or an optical detection device based on the deformation measurements. This innovation aims to eliminate errors in measurement of mark positions caused by frame deformation.

2. **Optical Measurement Device and Method with Improved Measurement Precision** - This patent presents an optical measurement device equipped with a position measurement device that measures inclinations of both the optical detection module and the substrate carrier during their movement. By calculating and correcting based on inclination data, the device ensures high precision in measurements, thus mitigating significant errors when measuring large-sized substrates.

Career Highlights

Yuzhi Li works at Shanghai Micro Electronics Equipment (Group) Co., Ltd., a company leading in the development of advanced electronic equipment. His role involves continuous research and development in optical measurement technology, where he applies his innovative ideas to enhance the efficiency and accuracy of measurement processes.

Collaborations

Throughout his career, Yuzhi has collaborated with talented individuals such as Bing Xu and Zhiyong Yang. Together, they have contributed to the company's innovative projects, sharing knowledge and expertise to drive advancements in their field.

Conclusion

Yuzhi Li is a notable figure in the realm of optical measurement technology. His impressive patent portfolio reflects his dedication to innovation and precision in measurement. With his contributions, he continues to shape the future of optical measurement solutions, influencing both industry practices and technological advancements.