Location History:
- Yamanashi, JP (2022)
- Nirasaki, JP (2022)
Company Filing History:
Years Active: 2022
Title: Innovations by Yuuki Motomura in Sputtering Technology
Introduction
Yuuki Motomura, an inventive mind from Yamanashi, Japan, has made significant contributions to the field of sputtering technology. With a total of two patents to his name, Motomura has been driving advancements in manufacturing processes through his innovative approaches.
Latest Patents
Motomura's latest patents include a sophisticated sputtering method and apparatus designed to enhance the efficiency of particle deposition on substrates. His sputtering method involves a unique pre-sputtering phase, where sputter particles are emitted from a target shielded by a shutter. This innovative process allows for greater control over the positioning of the shielding during both pre-sputtering and main-sputtering phases, significantly improving the deposition quality.
Additionally, his patent on a stage mechanism, processing apparatus, and method of operating the stage mechanism details an electrostatic chuck that features a conductive film and a moving member. This mechanism allows the electrostatic chuck to alternate between a grounded and a non-grounded state, facilitating enhanced control over substrate processing.
Career Highlights
Yuuki Motomura works at Tokyo Electron Limited, a prominent company known for its innovative solutions in semiconductor manufacturing. His experience and technical skills have been instrumental in the development of advanced technologies related to sputtering processes, which are crucial in the production of electronic components.
Collaborations
Motomura has collaborated with esteemed coworkers, including Kazunaga Ono and Atsushi Gomi, who share his passion for technological innovation. Their combined expertise has led to the successful creation of groundbreaking patents that contribute to the evolving landscape of semiconductor manufacturing.
Conclusion
In summary, Yuuki Motomura's contributions to sputtering technology reflect his dedication to innovation and excellence in the field. With two patents to his name and an impactful career at Tokyo Electron Limited, Motomura continues to influence the semiconductor industry, paving the way for future advancements in manufacturing technology.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.