Yuto Kosaka

Title: Yuto Kosaka: Innovator in Plasma Processing Technology

Introduction

Yuto Kosaka is a notable inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a unique plasma processing apparatus.

Latest Patents

Yuto Kosaka holds a patent for a plasma processing apparatus and processing method. This apparatus includes a chamber, a substrate support, and a bias power supply that supplies electrical bias energy to an electrode of the substrate support. Additionally, it features a matching box with a matching circuit and a radio-frequency power supply that delivers variable frequency power into the chamber. The system is designed to adjust the frequency of the radio-frequency power during various phase periods. A sensor detects electrical signals that indicate deviations in load impedance, while a filter generates a filtered signal by removing intermodulation distortion components.

Career Highlights

Yuto Kosaka is associated with Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His work at the company has been instrumental in advancing plasma processing technologies.

Collaborations

Yuto has collaborated with notable colleagues such as Chishio Koshimizu and Gen Tamamushi. Their combined expertise has contributed to the success of various projects within the company.

Conclusion

Yuto Kosaka's innovative contributions to plasma processing technology highlight his role as a key inventor in the field. His patent and work at Tokyo Electron Limited demonstrate his commitment to advancing technology in the semiconductor industry.