Oyama, Japan

Yutaka Shiraishi


Average Co-Inventor Count = 2.8

ph-index = 2

Forward Citations = 9(Granted Patents)


Company Filing History:


Years Active: 2014-2025

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23 patents (USPTO):Explore Patents

Title: Innovations by Yutaka Shiraishi: A Pioneer in EUV Technology

Introduction

Yutaka Shiraishi, based in Oyama, Japan, is a distinguished inventor and engineer known for his significant contributions to the field of technology and innovation. With an impressive portfolio of 23 patents, he has played a pivotal role in advancing the development of extreme ultraviolet light (EUV) generation and electronic device manufacturing methods.

Latest Patents

Shiraishi's recent innovations include a target supply system, an extreme ultraviolet light generation apparatus, and a method for manufacturing electronic devices. The target supply system is designed to produce a liquid target substance by melting a solid target, featuring advanced components such as a target generation unit, input mechanism, heater, sensor, and processor for optimized control. Furthermore, his EUV light generation apparatus utilizes pulse laser light to generate plasma, incorporating a complex chamber setup and a target supply unit that ensures precision and efficiency in the irradiation process.

Career Highlights

Yutaka Shiraishi works at Gigaphoton Inc., where he has been instrumental in the development of technologies that have enhanced the capabilities of semiconductor manufacturing. His expertise and inventive mind have positioned him as a leading figure in the realm of EUV technology, facilitating significant advancements in electronic devices.

Collaborations

Throughout his career, Shiraishi has collaborated with notable colleagues, including Tsukasa Hori and Fumio Iwamoto. These partnerships have fostered a creative environment where innovative ideas can flourish, contributing to the groundbreaking work that Gigaphoton Inc. is known for.

Conclusion

In summary, Yutaka Shiraishi's work exemplifies the spirit of innovation. His contributions in the fields of target supply systems, EUV light generation, and electronic device manufacturing are shaping the future of technology. With a strong foundation of patents and collaborative endeavors, Shiraishi's influence continues to resonate in the technology sector, inspiring future generations of inventors and engineers.

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