Shizuoka, Japan

Yutaka Miura

USPTO Granted Patents = 3 

Average Co-Inventor Count = 4.6

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:


Years Active: 1991-2012

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3 patents (USPTO):Explore Patents

Title: Yutaka Miura: Innovator in Semiconductor Technology

Introduction

Yutaka Miura is a notable inventor based in Shizuoka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on innovative methods for surface treatment of semiconductors, which are crucial for enhancing the performance and reliability of electronic devices.

Latest Patents

One of Miura's latest patents is a method for surface treating semiconductors. This invention involves dry etching a native oxide film on a semiconductor silicon wafer at a temperature of 50°C or less. Following this, hydrogen treatment is performed at a temperature of 100°C or more to bond the dangling bonds with hydrogen. The process utilizes a jig for loading new semiconductor silicon wafers, which undergo removal of the native oxide film and subsequent hydrogen bonding. The heat generated during this treatment remains in the jig, complicating the maintenance of appropriate temperatures for effective oxide film removal. Additionally, after hydrogen bonding, inert gas at temperatures ranging from 0 to -30°C is injected into the reaction vessel, enhancing the treatment process.

Career Highlights

Throughout his career, Yutaka Miura has worked with prominent companies, including Chugai Seiyaku Kabushiki Kaisha and F.t.l. Co., Ltd. His expertise in semiconductor technology has positioned him as a valuable asset in the industry, contributing to advancements that benefit various electronic applications.

Collaborations

Miura has collaborated with notable coworkers, including Mitsutaka Yoshida and Yasuo Fujimura. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Yutaka Miura's contributions to semiconductor technology through his innovative patents highlight his role as a key inventor in the field. His work continues to influence advancements in electronic devices, showcasing the importance of innovation in technology.

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