Company Filing History:
Years Active: 1989-1995
Title: Yutaka Amemiya: Innovator in Semiconductor Technology
Introduction
Yutaka Amemiya is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of semiconductor technology, particularly through his innovative patents. With a total of two patents to his name, Amemiya's work focuses on improving processes related to semiconductor wafer treatment.
Latest Patents
Amemiya's latest patents include an "Apparatus and method for treating substrates." This invention features a substrate treating apparatus that comprises a chamber designed for semiconductor wafer treatment and a section for plasma generation. The apparatus includes a supplier for mixed gas (O₂ + CF₄), high-frequency electrodes for plasma generation, an ion trap for trapping ions, and an exhaust mechanism for the wafer treating section.
Another notable patent is the "Method of ashing layers, and apparatus for ashing layers." This invention provides a method and apparatus for ashing unnecessary layers, such as photoresist layers, on semiconductor wafers. The process involves applying ozone to the layer and using an ashing gas containing oxygen atom radicals. This method enhances the efficiency of the ashing process by uniformly applying the gas and detecting the end-point of the process.
Career Highlights
Yutaka Amemiya is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has allowed him to develop and refine his innovative ideas, contributing to advancements in semiconductor technology.
Collaborations
Amemiya has collaborated with notable coworkers, including Hiroyuki Sakai and Kazutoshi Yoshioka. Their combined expertise has fostered a productive environment for innovation and development in their field.
Conclusion
Yutaka Amemiya's contributions to semiconductor technology through his patents demonstrate his commitment to innovation. His work continues to influence the industry and improve processes related to semiconductor wafer treatment.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.