Yuta Nakano

Title: Inventor Spotlight: Yuta Nakano

Introduction

Yuta Nakano is a talented inventor based in Kyoto, Japan, known for his significant contributions to substrate processing technology. With a total of two patents to his name, Nakano's inventions focus on advancing methods and devices that enhance substrate processing in various applications.

Latest Patents

Yuta Nakano's two latest patents include a substrate processing device, a substrate processing method, and a substrate processing system. The substrate processing device is characterized by its innovative design, which consists of a substrate holding table, an ultraviolet irradiator, a tubular member, as well as first and second gas supplying units. The ultraviolet irradiator is strategically positioned to face the substrate through an active space, allowing for effective ultraviolet light irradiation. The tubular member features an inner surface that encircles the side of the substrate holding table, including at least one opening for gas supply. The first gas supplying unit directs gas into the space between the side surface of the substrate holding table and the inner surface, while the second gas supplying unit supplies gas to the active space between the substrate and the ultraviolet irradiator.

In addition, Nakano's substrate processing method incorporates a rinse liquid supplying step to apply a rinse liquid containing water to the major surface of a substrate. This is followed by a rotating step to spin the substrate around its central axis. The method also includes a hydrophobizing agent supplying step, wherein a hydrophobizing agent containing a first dissolving agent is introduced to replace the liquid on the substrate's major surface while maintaining the rotation. The discharge of the hydrophobizing agent is precisely controlled, with the discharge port operating at a Reynolds number not exceeding 1500.

Career Highlights

Yuta Nakano is part of Screen Holdings Co., Ltd., a company well-regarded for its advancements in semiconductor and display technologies. His work focuses on pushing the boundaries of substrate processing, making significant impacts in industries that rely on advanced material applications.

Collaborations

Throughout his career, Nakano has collaborated with notable coworkers such as Takayoshi Tanaka and Masafumi Inoue. Their combined expertise highlights the importance of teamwork in fostering innovation within the tech industry.

Conclusion

Yuta Nakano's inventive spirit and technical prowess have made him a notable figure in the field of substrate processing. His patents reflect a commitment to enhancing technology in crucial sectors, proving that innovation continues to flourish with each new discovery.