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Yusuke Shimizu

USPTO Granted Patents = 4 (Patent Applications = 2)

Average Co-Inventor Count = 2.4

ph-index = 2

Forward Citations = 6(Granted Patents)

Location History:

Yamanashi, JP (2014)
Hwaseong, KR (2016)
Miyagi, JP (2020 - 2021)

Company Filing History:

4 out of 10,295

Tokyo Electron Limited

Years Active: 2014-2021

where 'Filed Patents' based on already Granted Patents

4 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 11011386 - Etching method and plasma treatment device (2021-05-18),

2. 10672622 - Etching method and etching apparatus (2020-06-02),

3. 9337020 - Resist mask processing method using hydrogen containing plasma (2016-05-10),

4. 8679985 - Dry etching method for silicon nitride film (2014-03-25),

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