The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2021
Filed:
Jun. 05, 2019
Tokyo Electron Limited, Tokyo, JP;
Yusuke Shimizu, Miyagi, JP;
Masahiko Takahashi, Hwaseong-si, KR;
Tokyo Electron Limited, Tokyo, JP;
Abstract
According to an exemplary embodiment, a method includes preparing a workpiece including a silicon film and a mask provided on the silicon film, etching the silicon film using the mask by plasma of a gas containing a first halogen atom, modifying a surface of the silicon film into an oxide layer by plasma of a gas containing an oxygen atom, a hydrogen atom, and a second halogen atom, the oxide layer including a first region extending along a side wall surface of the mask and a second region extending on the silicon film, etching the oxide layer to remove the second region while leaving the first region, and etching the silicon film using the mask and the oxide layer including the first region by plasma of a gas containing a third halogen atom.