Company Filing History:
Years Active: 2017-2025
Title: Yusuke Aoki: Innovator in Plasma Processing Technology
Introduction
Yusuke Aoki is a prominent inventor based in Miyagi, Japan. He has made significant contributions to the field of plasma processing, holding a total of 8 patents. His innovative work has advanced the technology used in substrate processing, making it more efficient and effective.
Latest Patents
Aoki's latest patents include a plasma processing method and a plasma processing apparatus. The plasma processing method involves supplying a voltage to an electrode in an electrostatic chuck to adsorb a substrate onto its surface. Once the voltage stabilizes, the supply is cut off, allowing the electrode to float. This method enables precise plasma processing on the substrate's surface. Another notable patent is the substrate processing method, which includes attracting a substrate to an electrostatic chuck and processing it. This method determines a charge removal temperature based on pre-stored information, ensuring optimal surface temperature for effective charge removal from the processed substrate.
Career Highlights
Yusuke Aoki is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in developing advanced technologies that enhance substrate processing capabilities.
Collaborations
Aoki has collaborated with notable colleagues such as Toshikatsu Tobana and Shinya Morikita. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Yusuke Aoki's innovative contributions to plasma processing technology have established him as a key figure in the field. His patents reflect a commitment to advancing substrate processing methods, showcasing his expertise and dedication to innovation.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.