Yuri Barsukov

Title: The Innovations of Yuri Barsukov in Semiconductor Technology

Introduction

Yuri Barsukov, an inventive mind based in Suwon-si, South Korea, has made significant contributions to the field of semiconductor technology. With two patents to his name, Barsukov is recognized for his innovations that enhance fabrication processes within the semiconductor industry. His work primarily focuses on etching methods utilizing advanced plasma technologies.

Latest Patents

Barsukov's latest contributions include two crucial patents:

1. **Etching method using remote plasma source** - This patent details a groundbreaking process for generating plasma by supplying a process gas to at least one remote plasma source (RPS) and applying power to the RPS. The method is crucial for etching materials such as SiNx by using a specific combination of plasma and control gases in a process chamber.

2. **Pulsed plasma analyzer and method for analyzing the same** - This innovative patent describes a pulsed plasma analyzer equipped with a pulse modulator that regulates the off-time of a pulsed plasma. It also includes an optical spectrometer for measuring emissions of the pulsed plasma, which enables the estimation of target radical concentrations during the off-time.

Career Highlights

Currently, Yuri Barsukov is employed at Samsung Electronics Co., Ltd., a leading global technology organization. His role involves integrating his patented methods into the company's semiconductor fabrication processes, making advancements that are vital for developing next-generation devices.

Collaborations

Throughout his career, Barsukov has collaborated with various talented professionals, including his coworkers Vladimir Volynets and Gon-jun Kim. These collaborations enable the sharing of insights and expertise, further pushing the boundaries of semiconductor research and development.

Conclusion

Yuri Barsukov's inventive contributions to semiconductor technology underscore the importance of innovation in enhancing manufacturing processes. As he continues to work at Samsung Electronics Co., Ltd., his two patents stand as a testament to his commitment to advancing the industry. His innovative etching and analysis methods are critical for the future of semiconductor devices.