Company Filing History:
Years Active: 2001-2002
Title: Innovations of Yuri A Eremin in Polarized Light Technology
Introduction
Yuri A Eremin is a notable inventor based in Moscow, Russia, recognized for his contributions to the field of polarized light technology. With a total of 2 patents, he has developed methods that enhance the ability to distinguish between various defects on substrates.
Latest Patents
Eremin's latest patents include a method for discriminating between holes in and particles on a film covering a substrate. This innovative technique involves directing P-polarized light onto a filmed substrate at multiple incidence angles. By measuring the intensity of the scattered light, defects can be classified as either holes or particles based on the relative intensities collected. Another significant patent is the method and apparatus for distinguishing particles from subsurface defects on a substrate using polarized light. This method utilizes polarized light to differentiate between particles and subsurface defects by comparing total integrated responses, which vary with changes in the incident angle.
Career Highlights
Throughout his career, Yuri A Eremin has worked with reputable companies such as Ade Optical Systems Corporation and Ade Corporation. His work has significantly impacted the field of optical systems and defect detection.
Collaborations
Eremin has collaborated with notable professionals in his field, including John C Stover and Craig A Scheer. Their combined expertise has contributed to advancements in polarized light applications.
Conclusion
Yuri A Eremin's innovative work in polarized light technology has led to significant advancements in defect detection methods. His contributions continue to influence the field and inspire future innovations.