This inventor holds 3 USPTO granted patents. Top assignees: Taiwan Semiconductor Manufacturing Comp. Ltd., Coretronic Corporation. Active years: 1997-2016.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- Hsin-chu Hsien, TW (1997)
- Hsin-chu, TW (1998 - 2016)
Company Filing History:
2 out of 42,872 
1 out of 1,255 Years Active: 1997-2016
Title: Yung-Ta Chen: Innovator in Illumination Systems and Photoresist Applications
Introduction
Yung-Ta Chen is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the fields of illumination systems and photoresist applications, holding a total of 3 patents. His innovative work has had a substantial impact on the semiconductor industry.
Latest Patents
One of Yung-Ta Chen's latest patents is an illumination system designed for projection apparatuses. This system includes a light source module, an integrating rod, and an optical detecting module. The light source module emits an illuminating light beam, while the integrating rod has a light entrance surface facing the light source module. The optical detecting module features a light guiding device and an optical detecting device, which work together to adjust the intensity of the illuminating light beam based on detected light.
Another significant patent involves an improved method and apparatus for applying a photoresist primer to a wafer. This method includes priming a wafer with HMDS, removing it from the priming chamber, and closing the chamber. The system maintains a partial vacuum to prevent primer condensation, thereby enhancing photolithographic yields and device yields.
Career Highlights
Yung-Ta Chen has worked with prominent companies in the semiconductor industry, including Taiwan Semiconductor Manufacturing Company Ltd. and Coretronic Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas.
Collaborations
Throughout his career, Yung-Ta Chen has collaborated with talented individuals such as Wen-Chih Yang and Sheng-Yu Chiu. These partnerships have contributed to the advancement of his projects and innovations.
Conclusion
Yung-Ta Chen's contributions to illumination systems and photoresist applications demonstrate his commitment to innovation in the semiconductor field. His patents reflect a deep understanding of technology and a drive to improve manufacturing processes.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile