Location History:
- Kanagawa-ken, JP (2001)
- Isehara, JP (2002 - 2004)
Company Filing History:
3 out of 507 
1 out of 267 
1 out of 832,966 Years Active: 2001-2004
Title: Yuko Yamaguchi: Innovator in Resist Technology
Introduction
Yuko Yamaguchi is a prominent inventor based in Isehara, Japan. She has made significant contributions to the field of resist technology, holding a total of 5 patents. Her innovative work has advanced the development of materials used in semiconductor manufacturing.
Latest Patents
Yamaguchi's latest patents include a process for preparing resists and a method for forming patterns. The process for preparing resists involves reacting an alkali-soluble polymer with a vinyl ether compound in an aprotic solvent, such as propylene glycol monomethyl ether acetate, in the presence of an acid catalyst. This method allows for the direct addition of a photoacid generator to the reaction solution. The pattern forming method focuses on suppressing the production of reaction products at the interface between an organic anti-reflective coating and a radiation-sensitive material coating. This technique enhances the resolution and dimensional accuracy of etched patterns.
Career Highlights
Throughout her career, Yuko Yamaguchi has worked with notable companies, including Clariant Finance Limited and Clariant International Ltd. Her expertise in resist technology has positioned her as a key player in the semiconductor industry.
Collaborations
Yamaguchi has collaborated with esteemed colleagues such as Yoshiaki Kinoshita and Satoru Funato. These partnerships have further enriched her research and development efforts.
Conclusion
Yuko Yamaguchi's contributions to resist technology and her innovative patents have made a lasting impact on the semiconductor industry. Her work continues to inspire advancements in material science and engineering.