Yukio Iimura

Title: Innovations of Yukio Iimura

Introduction

Yukio Iimura is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of lithography and wireless suspension technology. With a total of 8 patents, his work has advanced the manufacturing processes in these areas.

Latest Patents

Iimura's latest patents include innovations such as the transfer mask blank, transfer mask, and transfer method using the transfer mask. These inventions aim to effectively manufacture charged-particle beam lithography masks, X-ray lithography masks, and extreme ultraviolet beam lithography masks. His designs utilize existing writers, such as electron beam writers for photomasks, while improving the processing accuracy of mask patterns. The lithography mask comprises a substrate with an opening and a self-supporting membrane that has a pattern region corresponding to the opening. This innovative design includes through-holes or absorbers/scatterers of a mask pattern, ensuring that the pattern region and the peripheral region are in one plane.

Another notable patent is the method of manufacturing a wireless suspension blank. This invention employs a two-layer laminate composed of a metallic layer with spring properties and an electrically insulating layer. The manufacturing process includes various methods such as photo etching, semi-additive methods, and both wet and dry etching techniques. The use of a two-layer laminate allows for low-cost production while maintaining high accuracy in fine wiring parts.

Career Highlights

Throughout his career, Yukio Iimura has worked with notable companies such as Dai Nippon Printing Co., Ltd. and Mitsubishi Electric Corporation. His experience in these organizations has contributed to his expertise in the field of technology and innovation.

Collaborations

Iimura has collaborated with esteemed colleagues, including Masahiro Takahashi and Keiji Hashimoto. These partnerships have further enriched his work and expanded the impact of his inventions.

Conclusion

Yukio Iimura's contributions to the fields of lithography and wireless suspension technology demonstrate his innovative spirit and dedication to advancing manufacturing processes. His patents reflect a commitment to improving accuracy and efficiency in technology.