Yukie Minekawa

Title: Innovations of Yukie Minekawa

Introduction

Yukie Minekawa is a prominent inventor based in Koshi, Japan. She has made significant contributions to the field of liquid processing technology. With a total of two patents to her name, Minekawa's work focuses on enhancing filtration efficiency and exposure methods.

Latest Patents

Her latest patents include a "Liquid processing apparatus, liquid processing method, and storage medium for liquid process." This invention allows for a filtration efficiency comparable to that achieved with multiple filters, utilizing a single filter to prevent throughput decrease. The apparatus operates by sucking a resist liquid into a pump through a filter, discharging part of it from a nozzle, and returning the remaining liquid to the supply conduit. The process is synthesized by adding a replenishment amount equal to the discharge amount to the return amount.

Another notable patent is the "Exposure apparatus, exposure method and storage medium." This invention features a stage for substrate placement, multiple light irradiation units for independent light emission, and a rotation mechanism for substrate rotation relative to the irradiation area. The control unit enables the apparatus to perform a two-step exposure process, ensuring the entire surface of the substrate is effectively exposed.

Career Highlights

Yukie Minekawa is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics industry. Her innovative work has positioned her as a key figure in advancing liquid processing technologies.

Collaborations

Some of her notable coworkers include Koji Takayanagi and Yuichi Yoshida, who contribute to her collaborative efforts in research and development.

Conclusion

Yukie Minekawa's contributions to liquid processing technology and exposure methods highlight her innovative spirit and dedication to advancing her field. Her patents reflect her commitment to improving efficiency and effectiveness in technology applications.