Yuji Yamaguchi

Title: Yuji Yamaguchi: Innovator in Semiconductor Measurement Technologies

Introduction

Yuji Yamaguchi is a notable inventor based in San Antonio, TX (US), recognized for his contributions to semiconductor measurement technologies. With a total of two patents to his name, Yamaguchi has made significant advancements in the field.

Latest Patents

Yamaguchi's latest patents include a "Method and lithographic structure for measuring lengths of lines and spaces." This invention provides a structure and method for accurately measuring the lengths of lines and spaces in semiconductor processes. The lithographic structure comprises a frame with various edges and includes a first array of lines and spaces, each with specific widths and distances from the frame's edges.

Another significant patent is the "Overlay box structure for measuring process induced line shortening effect." This invention allows users to measure process line shortening (PLS) on an overlay tool. By determining the misalignment of a composite image on a substrate, users can calculate total line shortening (TLS) and equipment line shortening (ELS), ultimately determining PLS as a function of TLS and ELS.

Career Highlights

Throughout his career, Yuji Yamaguchi has worked with prominent companies, including NXP B.V. His work has focused on enhancing measurement techniques in semiconductor manufacturing, contributing to the industry's advancement.

Collaborations

Yamaguchi has collaborated with various professionals in his field, including his coworker Pierre Leroux. These collaborations have further enriched his work and innovations.

Conclusion

Yuji Yamaguchi's contributions to semiconductor measurement technologies through his patents demonstrate his innovative spirit and commitment to advancing the field. His work continues to influence the industry and inspire future innovations.