Ebina, Japan

Yuji Kato


Average Co-Inventor Count = 4.0

ph-index = 1

Forward Citations = 12(Granted Patents)


Company Filing History:


Years Active: 2009

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1 patent (USPTO):Explore Patents

Title: Yuji Kato: Innovator in Semiconductor Processing Technology

Introduction

Yuji Kato is a prominent inventor based in Ebina, Japan. He has made significant contributions to the field of semiconductor processing technology. His innovative ideas have led to the development of a unique shower head structure that enhances the efficiency of semiconductor manufacturing.

Latest Patents

Yuji Kato holds 1 patent for his invention titled "Shower head structure for processing semiconductor." This patent describes a shower head structure designed to supply processing gas to a processing space while accommodating a heated processed substrate. The design includes a plurality of gas injection holes for gas supply and a light introducing rod for a radiation thermometer, which is inserted into one of the gas injection holes.

Career Highlights

Kato is currently employed at Tokyo Electron Limited, a leading company in the semiconductor industry. His work focuses on improving semiconductor processing techniques, which are crucial for the advancement of electronic devices. His innovative contributions have positioned him as a key figure in his field.

Collaborations

Yuji Kato has collaborated with notable colleagues, including Toshio Takagi and Takeshi Sakuma. These partnerships have fostered a creative environment that encourages the development of cutting-edge technologies in semiconductor processing.

Conclusion

In summary, Yuji Kato is an influential inventor whose work in semiconductor processing technology has made a significant impact on the industry. His innovative shower head structure exemplifies his commitment to advancing manufacturing techniques.

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